This master-level course details the fundamentals of proceses and techniques which are used in MEMS and microelectronics. The course covers fundamentals of cleanroom and vacuum technolocy, MEMS processing (semiconductor substrates, silicon, polymers), properties of relevant MEMS materials, techniques such as thermal oxidation, photolithography, dry and wet etching, Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), as well as back end processing (bonding, dicing, assembly and packaging).
The current self-enrollment key is: mst2021
- Teacher: Björn Gerdes
- Teacher: Bastian Rapp
- Teacher: Kay Steffen